Silicon Low Power, Low Voltage MEMS Switches for Space Communication Systems

نویسندگان

  • R. W. Moseley
  • E. M. Yeatman
  • A. S. Holmes
  • R.R.A. Syms
  • A. P. Finlay
  • P. Boniface
چکیده

This paper describes a MEMS RF switch designed and developed specifically for space communication systems, with a novel geometry and operating mode that overcome the drawbacks of previous devices. To avoid the need for high voltage control, the switch uses electro-thermal rather than electrostatic operation; although this requires higher power consumption during switching, a latching configuration was used such that the hold power is zero in either switch state. This requires that the actuation is lateral (with respect to the chip surface) rather than vertical as in most MEMS switches. Lateral actuation allowed a large open-state separation to be achieved, leading to high-isolation performance. The latching operation also inherently provides high mechanical stability.

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تاریخ انتشار 2005