Silicon Low Power, Low Voltage MEMS Switches for Space Communication Systems
نویسندگان
چکیده
This paper describes a MEMS RF switch designed and developed specifically for space communication systems, with a novel geometry and operating mode that overcome the drawbacks of previous devices. To avoid the need for high voltage control, the switch uses electro-thermal rather than electrostatic operation; although this requires higher power consumption during switching, a latching configuration was used such that the hold power is zero in either switch state. This requires that the actuation is lateral (with respect to the chip surface) rather than vertical as in most MEMS switches. Lateral actuation allowed a large open-state separation to be achieved, leading to high-isolation performance. The latching operation also inherently provides high mechanical stability.
منابع مشابه
Design and simulation of a RF MEMS shunt capacitive switch with low actuation voltage, low loss and high isolation
According to contact type, RF MEMS switches are generally classified into two categories: Capacitive switches and Metal-to-Metal ones. The capacitive switches are capable to tolerate a higher frequency range and more power than M-to-M switches. This paper presents a cantilever shunt capacitive RF MEMS switch with characteristics such as low trigger voltage, high capacitive ratio, short switchin...
متن کاملModeling and Fabrication of RF MEMS Switches
MicroElectroMechanical Systems (MEMS) are becoming increasingly important. The benefits of MEMS include small size, low weight, and low cost. In addition, Radio Frequency MEMS switches offer low insertion loss, high quality factor, low power, high isolation, and broadband frequency performance. Modeling of electrostatically-actuated, capacitive switches is reviewed and fabrication steps are des...
متن کاملRF MEMS Switch Technology
Commercial Applications Solid state and electromagnetic relay switches are being replaced by MEMS switches due to their lower costs and increased application performance. Some of the benefits of MEMS switches include low power consumption, long life cycle, linearity and increased switching speeds. Applications include highspeed digital channel switching in automated test equipment, filter bank ...
متن کاملRobust Lyapunov-based Control of MEMS Optical Switches
In this paper, a robust PID control scheme is proposed for Micro-Electro-Mechanical-Systems (MEMS) optical switches. The proposed approach is designed in a way which solves two challenging and important problems. The first one is successful reference tracking and the second is mitigating the system nonlinearities. The overall system composed of nonlinear MEMS dynamics and the PID controller is ...
متن کاملA New Single-phase Symmetrical Cascade Multilevel Inverter with Low Number of Power Switches
In this paper a new 5-level single phase symmetrical cascade multi-level inverter is proposed. The proposed topology contains combination of unidirectional and bidirectional power switches based on output voltage level number. The number of power switches and withstanding voltage of powers witches were reduced related to the other topologies. This configuration can be extended to the n-level in...
متن کامل